Microfabrication Techniques (P03060)

? Credit Points : 10 ? SCQF Level : 11 ? Acronym : EEL-P-P03060

This module will examine the fabrication processes employed in the manufacture of microelectronic devices and microsystems. Initial lectures will cover the well established, industry standard steps used in silicon CMOS technology. The basic science underlying the individual process steps will be presented, along with key aspects of manufacturing and production strategies. Building on this knowledge base, students will study the enabling technologies required for future advanced MEMS devices and microsystems. There will be a special emphasis on those processes of particular importance to the fabrication of bioelectronic devices, including deep etching of microfluidic channels, wafer bonding, moulding techniques and biocompatibility of materials. The lectures will not be exclusive to silicon processing, but will also examine increasingly important areas such as plastic and organic electronic device manufacture. The cleanroom facilities of the Scottish Microelectronics Centre, based at the University of Edinburgh, will allow students a unique, first-hand experience of a diverse microfabrication toolset, and provide the ideal backdrop to other lectures in this MSc course.

? Keywords : Silicon Processing, deposition, etching, photolithography, MEMS, Microsystems, microfluidics, biocompatibility

Entry Requirements

? This course is not available to visting students.

Subject Areas

Home subject area

Postgraduate (School of Engineering and Electronics), (School of Engineering and Electronics, Schedule M)

Delivery Information

? Normal year taken : Postgraduate

? Delivery Period : Not being delivered

? Contact Teaching Time : 1 hour(s) 40 minutes per week for 10 weeks

All of the following classes

Type	Day	Start	End	Area
Lecture	Sunday	09:00	09:50	KB

Summary of Intended Learning Outcomes

The students will receive an essential overview of the IC fabrication industry, and be able to understand: the principles behind the operation of semiconductor devices and the effect of processes on their performance; a thorough understanding of the technology behind the fabrication of silicon devices; a good working knowledge of standard process architectures; a wide breadth of knowledge of all the key elements involved in the fabrication of integrated circuits.